Treatment of Dust Particles in an RF Plasma Monitored by Mie Scattering Rotating Compensator Ellipsometry

Treatment of Dust Particles in an RF Plasma Monitored by Mie Scattering Rotating Compensator Ellipsometry
Swinkels, G.H.P.M., Stoffels, E., Stoffels, W.W., Simons, N., Kroesen, G.M., de Hoog, F.J.
Pure & Appl. Chem. 1998, 70, 1151-1156